[PDF] A CMOS-MEMS Pressure Sensor with Integrated Front-End for Chemical Vapor Deposition Systems

journal：2023 IEEE SENSORS

Authors：Tsung-Heng Tsai; Song-You Hong

Published date：2023-10-29

DOI：10.1109/sensors56945.2023.10325313

PDF link：https://ieeexplore.ieee.org/stampPDF/getPDF.jsp?arnumber=10325313

Article link：http://dx.doi.org/10.1109/sensors56945.2023.10325313

Article Source：IEEE。