[PDF] Gas Sensor Based on Nonlinear Coupled AlN-Piezoelectric Micromachined Resonators

journal：2023 IEEE SENSORS

Authors：Zhengliang Fang; Stephanos Theodossiades; Nizar Jaber; Amal Z. Hajjaj

Published date：2023-10-29

DOI：10.1109/sensors56945.2023.10324875

PDF link：https://ieeexplore.ieee.org/stampPDF/getPDF.jsp?arnumber=10324875

Article link：http://dx.doi.org/10.1109/sensors56945.2023.10324875

Article Source：IEEE。