[PDF] Surface Micromachined Out-of-plane Electrostatic MEMS Actuator Integrated with Displacement Sensor

journal：2021 IEEE Sensors

Authors：Seyedfakhreddin Nabavi; Michael Menard; Frederic Nabki

Published date：2021-10-31

DOI：10.1109/sensors47087.2021.9639643

PDF link：https://ieeexplore.ieee.org/stampPDF/getPDF.jsp?arnumber=9639643

Article link：http://dx.doi.org/10.1109/sensors47087.2021.9639643

Article Source：IEEE。